A series of ion accelerators for industry

Ion accelerators intended for application to electronics industry, surface modification and other technologies are described. A series of the accelerators are characterized by horizontal ion beam position. The energy ranges from 20 keV to 1.5 MeV. In the frame of this project, the ION-300, ION-1500 installations were designed, built and successfully tested. The main rectifier and high voltage terminals of the accelerators have a power supply of the increased frequency. The high voltage terminals are supplied with a power up to 2.2 kW using special small-size resonant transformers. The accelerators are provided with ion beam separation on full energy, oil-free vacuum, high voltage isolation (SF/sub 6/), and an intelligent automatic control system with an IBM PC host computer. A special set of technical, hardware and software decisions allows us to meet the reliability requirements.