CMOS-integrated 40GHz germanium waveguide photodetector for on-chip optical interconnects

Compact (0.7 mum times 20mum) germanium waveguide photodetector operating at 40 Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.