Inspection of materials for advanced sensors

The main objective of this paper is to describe a research project on the integration of advanced versions of several known experimental techniques into an economic and versatile intelligent system for investigation of surface and bulk properties of a wide range of high resistivity materials and devices. The properties include metal/insulator contact, surface, bulk and interface trapping, surface and bulk resistivity, space charge effects and dipole processes, photoinduced and dark decay of surface charges and charge carrier transport. Effect of temperature, gases and pressure on these properties can also be investigated for developing new sensors.