A micromechanical relay with a thermally-driven mercury micro-drop

We present a mercury-contact micro-mechanical relay. While microrelays have been introduced to MEMS on several occasions, all are based on solid contacts, leaving the same contact problems faced by macroscale mechanical relays. The goal of our device is to use mercury to eliminate surface degradation, signal bounce, and high resistance at contacts common in solid contact devices. Descriptions of the design and fabrication of a micromechanical relay with a thermally-driven 25 /spl mu/m mercury micro-drop are presented, including the technique for formation of mercury droplets, as well as some data on the switching performance of the relay. Video demonstration of the actuation sequence will be presented.