Development of mass productive micro stereo lithography (Mass-IH process)

Mass productive 3D micro fabrication process based on micro stereo lithography is proposed and verified experimentally. By using an array of micro optical fibers, a new multi-beam scanning method with high accuracy can be obtained in the whole fabrication area. Since this technique is based on the "IH process" developed (Ikuta et al., MEMS'93, 94), it was named "Mass-IH process". This process enables us to fabricate MIFS (Micro INtegrated Fluid System) under mass and low cost production similar to silicon process. Future applications of MIFS for Biochemical LSI" and "Biochemical Computer" along with biomedical devices are described.