Replica molding of polymeric components for microsystems

The paper presents the replicas for various patterns (dots, lines, prism and lens) obtained in polymethylmethacrylate (PMMA), epoxy resin and polydimethylsiloxane (PDMS) in different conditions for polymer coating. By properly understanding of the all factors affecting the process, we follow to improve the quality of the replicas and to apply the replica molding in micro/nanofabrication of the components for microsystems.