High permittivity ferroelectric actuators for radar applications

We report a new method of fabricating thermal bimorph actuators utilizing high permittivity ferroelectric thin films. This device is the first known thermal cantilever actuator employing barium titanate (BaTiO
₃
) for RF applications. Compared to electrostatic actuators, this MEMS structure is designed to handle high RF transmitted power while maintaining a high capacitance ratio due to the high permittivity of the ferroelectric thin film employed and without the stiction problems normally associated with other MEMS actuators.