Single-structure heater and temperature sensor using a p-type polycrystalline diamond resistor

Heat generation and temperature sensing are reported in a single p-type diamond resistor fabricated on an oxidized Si substrate using diamond film technology compatible with integrated circuit (IC) processing. Power densities in excess of 600 W/in./sup 2/ are observed for the heaters. The temperature response of the sensor is characterized in the temperature range of 300-725 K. Such a diamond heater/sensor device is reported for the first time.