Interactive Semiconductor Process Overview

The Interactive Semiconductor Process Overview (ISPO) is a multimedia CD-ROM package that is based on a successful Semiconductor Processing Overview course developed through a partnership between the Texas A&M University System and several major Texas semiconductor manufacturers. The ISPO focuses on the basic process terminology, the key equipment components and the most sensitive quality issues of each major processing step. The ISPO includes a customized course management system and navigation system to assist the course coordinator and student to maximize the learning experience. The material is designed with the potential for three different levels of instruction. The technical content is divided into modules corresponding to major process steps or topics, with each process module further modularized into standard sub-modules. The ISPO's interactive, visual emphasis is developed and maintained through a combination of 3-D graphics, scanned images, video clips, computer-generated animations and visual simulations. The animations depict the essence of various technical concepts with all spurious elements removed. The visual simulations are developed from physically accurate mathematical models and correctly scaled graphics. The visual simulations allow students to vary input control parameters to pre-selected values and observe the resulting effect on the process.