MEMS based Laser Imager with Diagonal Progressive Scanning

This paper presents a novel concept of a laser scanning imager with diagonal progressive scanning using electrostatic resonant 2D-gimbal mirrors. Typically a horizontal progressive raster scanning cannot be realized for resonant 2D-scanners due to a lower frequency limit. Alternative to raster scanning we introduce the novel concept of diagonal progressive scanning using a high frequency resonant 2D-scanner of specific constant frequency ratio. The focus of this work is on the design of the novel 2D-scanner, where an increased frequency bandwidth was realized by using multiple degressive spring suspensions and more efficient comb geometries. Simulated and experimental results of the 2D-scanner and VGA laser imaging system are shown.