High Speed (GHz), Ultra-High Pressure (GPA) Sensor Array Fabricated in Integrated CMOS+MEMS Process

In order to observe and quantify pressure levels generated during testing of energetic materials, a sensor array with high temporal resolution (~1 ns) and extremely high pressure range (> 1 GPa) is needed. We have developed such a sensor array which utilizes a novel integrated high performance CMOS+MEMS process.