Acceleration Compensation of MEMS Resonators using Electrostatic Tuning

A method of using electrostatic tuning to compensate the phase noise due to external vibrations in a MEMS oscillator is presented in this paper. An accelerometer measures the acceleration applied to a resonator, and a compensation signal generated by the accelerometer is added to the bias voltage. We achieve 91% reduction of the acceleration sensitivity for sinusoidal accelerations from 100 Hz to 300 Hz using a double-ended tuning fork resonator. This is the first demonstration of active acceleration compensation for MEMS resonators.