On an AlGaInP-Based Light-Emitting Diode With an ITO Direct Ohmic Contact Structure

An interesting AlGaInP multiple-quantum-well light-emitting diode (LED) with a direct ohmic contact structure, formed by an indium-tin-oxide (ITO) transparent film and AuBe diffused thin layer, is fabricated and studied. The direct ohmic contact structure is performed by the deposition of an AuBe diffused thin layer and the following activation process on the surface of a Mg-doped GaP window layer. Experimental results demonstrate that a dynamic resistance of 5.7 Omega and a forward voltage of 1.91 V, under an injection current of 20 mA, are obtained. In addition, the studied LED exhibits a higher external quantum efficiency of 9.7% and a larger maximum light-output power of 26.6 mW. The external quantum efficiency is increased by 26% under the injection current of 100 mA, as compared with the conventional LED without this structure. This is mainly attributed to the reduced series resistance resulted from the relatively uniform distribution of AuBe atoms near the GaP layer surface and the effective current spreading ability by the use of ITO film. Moreover, the life behavior of the studied LED, under a 20-mA operation condition, is comparable to the conventional LED without this structure.