Sub-50nm DG-TFT-SONOS - the ideal Flash memory for monolithic 3-D integration

A revolutionary 3-D stackable sub-50nm double-gate TFT SONOS technology is presented here with series strings of up to 64 cells consisting of the smallest silicon-based TFT's to date. Read- and program-pass disturbs have been extinguished. Excellent endurance and retention are shown. Monolithic 3-D integration and scalability are ensured through close to zero source/drain diffusion. Finally, comparisons with TANOS are given.