Lithography and the future of Moore's Law | IEEE Journals & Magazine | IEEE Xplore

Lithography and the future of Moore's Law


Abstract:

Semiconductor technology has made its great strides as a result of ever increasing complexity of the products produced exploiting higher and higher density to a considera...Show More
Notes: Copyright 1995 IEEE. Reprinted with permission. Proc. SPIE Vol. 2437, pp. 2-17

Abstract:

Semiconductor technology has made its great strides as a result of ever increasing complexity of the products produced exploiting higher and higher density to a considerable extent the result of progress in lithography. This article reviews the history and past performance of Moore's Law relative to predictions and shows where the advances have come from.
Notes: Copyright 1995 IEEE. Reprinted with permission. Proc. SPIE Vol. 2437, pp. 2-17
Published in: IEEE Solid-State Circuits Society Newsletter ( Volume: 11, Issue: 3, September 2006)
Page(s): 37 - 42
Date of Publication: 20 February 2009
Print ISSN: 1098-4232

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