Physical Model Extracting of Spiral Inductor on Glass Substrate

In order to decrease substrate loss and perform high quality factor of spiral inductors, high resistivity glass substrate is used to characterize and model spiral inductor for SiP application in this study. We use 6 ¿m thick copper film for spiral structure and the dielectric material is polyimide. We establish physical models by using frequency-independent lump elements that one is the conventional ¿ -model, the other is the ¿ -model added the skin-effect. The quality factor is about 25~40 and the inductance is 1~10 nH.