Design and analysis of 600 V power MOSFET with multiple field limiting ring

This paper presents an analytical model and optimization process for multiple floating field limiting ring (MFFLR) structure pursuing high voltage blocking capability with evenly distributed electric field. The three-dimensional (3-D) model considers both the sphere-junction effect and cylindrical-junction effect, which formulates an accurate 3-D model for optimization. Design example obtained by the proposed method is examined with MEDICI simulation and consistent results are observed.