Scaling effect research on micro-machined gas-pendulum dual-axis tilt sensors

This paper describes the scaling effect on the micro-machined gas-pendulum dual-axis tilt sensor from two aspects, microscale gas flow and microsystem technology, based on the design, fabrication and capability of the sensor; detailedly founds the theory model and analysis method of the sensor miniaturization in every stage whose demarcation points are 0.25μm and 0.5μm; simulates the gas flow in the continuous medium hypothesis. This paper analyses the effect of surface-area-to-volume ratio increase, surface roughness, viscous force etc on the gas flow of the micro sensor. This paper computes tests and experiments the residual stress of the electrodes and multilayer films of this sensor, puts forward the method to eliminate residual stress, solves the problem that films break off in the process of chip fabrication. The harvest of this paper is very important to farther micromation and improving capability of micro-machined gas-pendulum dual-axis tilt sensors.