Flexible micro thermoelectric generator based on electroplated Bi2+xTe3−x

We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi
_2+x
Te
_3-x
thermocouples in a SU-8 mold. Demonstrator devices generate 278 muWcm
^-2
at DeltaT
_meas
=40 K across the experimental set up. Based on model calculations, a temperature difference of DeltaT
_G
=21.4 K across the generator is assumed. Due to the flexible design and the chosen generator materials, the performance stays high even for curved contact surfaces. The measurement results correlate well with the model based design optimization predictions.