Integrated Magnetic Loop Probe in GaAs Technology for Active Near-Field Sensor

This paper reports on design, simulation and measurement of miniature rectangular loops in OMMIC ED02AH GaAs technology. The loops are intended for integration on chip with other active circuitry for near-field scanning of printed circuit boards (PCB) as well as large scale integrated (LSI) circuits. Our target frequency range is from 1 MHz to 3 GHz and is planned to extend up to 10 GHz. Electromagnetic (EM) field simulation results from two simulators as well as on-wafer measurement results are presented. A new rectangular loop structure using the via-hole and backside metallization is proposed.