Design and performance of a Ku-band 6-bit MMIC phase-shifter

This paper describes design consideration and performance of a Ku-band monolithic phase shifter utilizing 0.25-um PHEMT switches. The developed 6-bit phase shifter demonstrates an overall phase deviation less than 1.5 rms and an insertion loss variation less than 0.35 dB rms from 12 to 15 GHz. For all 64 states, the insertion loss is measured to be 9 dB and the VSWR is less than 1.4. The chip size of the monolithic phase shifter is 3.1 mm × 1mm.