Development of micro universal testing machine system for material property measurement of micro structure

Micro universal testing machine (UTM) System for material property measurement of micro structure is proposed. This system using for elongation, compression, repeat vibration, and thin film exfoliation test is developed by analysis of driving property of the voice coil motor (VCM), and consisted with sensing module, driving module, signal analysis module, and alignment module. To verify the applicability of developed micro UTM system in the micro structure, performance test is conducted. From the performance test, the developed micro UTM system has performance such as maximum force of 29.4mN, unit force of 0.029mN, full stroke of ± 1mm, unit stroke of 1μm, respectively. Developed micro UTM system can be applicable in the micro structure.