MI007: Galvanic piezoelectric RF MEMS switches

Galvanic piezoelectric RF MEMS switches are presented. The switches are completely processed and characterized mechanically and electrically. The mechanic deformation and switching times are discussed. Closing of the switch can be achieved within less than 10 μs. Electrical measurements yield contact resistances in the order of 50 Ω and isolation resistance of more than 1 GΩ.