Inductor-based ESD protection under CDM-like ESD stress conditions for RF applications

Charged device model (CDM) electrostatic discharge (ESD) stress is a major concern for inductor-based ESD protection strategies for RF circuits processed in advanced nano-CMOS technologies. The CDM robustness of such protection methodology is investigated in this paper based on very-fast transmission line pulse (VFTLP) measurements. Its applicability is discussed for future technologies and RF applications.