The XeCl-excilamp on the basis of inductive high-frequency discharge

The results of experimental research of noble gas halide excilamp, using inductive high-frequency discharge, are presented. Advantage of this excilamp consists in simplicity of its design. As a source of excitation the power supply unit of own construction was used at pulse repetition frequency 10,5 MHz. Average power of energy deposition in the active medium changed from 40 up to 160 W. At an optimum mode of excitation and composition of active medium (HCl:Xe:He=1:20:20 and total pressure 2 Torr) output power of radiation ~ 10 W has been received at efficiency ~ 10 %.