The millimeter-wave detector using vanadium oxide with planar structure antenna

We have developed a new millimeter-wave detector. The detector consists of a micro bolometric detecting part, a micro heater and a micro antenna. Vanadium oxide thin film was deposited for thermal detecting materials. The micro log-periodic bow-tie antenna having resonance frequency of 140 GHz was designed and simulated. The antenna coupled detectors were fabricated by MEMS technology. The fabricated detector showed resonance frequency of 140 GHz which is the same as simulation result and large TCR value of 4%.