System design for cooperative control of a microactuator array

A system design is presented with the aim of controlling many microactuators as autonomous distributed micromachines (ADMs). ADMs consist of many microcells which are smart enough to control their own motions and to cooperate with each other. A conveyance system in a plane is selected as an example of ADMs. We have developed a practical design of ADMs composed of many microcells integrated with actuators, sensors, and circuits which can be fabricated by IC-compatible micromachining. The behavior of the system is examined by simulation on a computer model. A fluidic microactuator array for a conveyor has also been fabricated and operated successfully.<
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