Characterization of SOI Lamé-mode square resonators

Characterization of Lamé-mode square resonators with different straight-beam anchor lengths, structural layer thickness, and number of anchor support reveals that there is likely an optimal range of anchor designs that provide high quality factor (Q) above one million, along with low motional resistance. Shorter anchor length restricts resonator vibrations and motional resistance could be increased by 3.5 times compared to resonators with longer anchor length. Two-anchor support design is able to achieve higher Q’s but results in higher motional resistance compared to four-anchor support. When structural thickness is reduced from 25μm to 10μm, Q gets degraded but still maintained above one million.