Space-and Time-Resolved E–H Transition in an Inductively Coupled Plasma in Ar

Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p
₁
) shows the temporal change of the active area for the plasma production as a function of time.