MEMS Courses for Undergraduates

Two MEMS courses have been developed for all science and engineering majors to learn basics of design, fabrication, and characterization of MEMS devices. The first course introduction to MEMS is to introduce the essentials of microfabrication technique by making heat actuators for laboratory component. While the second course, Advanced Topics in MEMS, covers in depth modeling, process flow, photolithography, and microfluidics with projects for the laboratory components.