Microfabricated coupled-cavity backward-wave oscillator for terahertz imaging

A design study of a 0.1-THz coupled-cavity backward-wave oscillator (CCBWO) is presented using a finite element method and a particle-in-cell simulation. In experiments, the Si-based technology of 2-step deep reactive ion etching (DRIE) and eutectic bonding shows a good potential for the microfabrication of the interaction circuit. A miniaturized field emission cathode using carbon nanotubes grown by chemical vapor deposition (CVD) is also a good candidate for the electron beam generation. An integration of the cathode and the interaction circuit will be discussed. In addition, a preliminary design of a continuous-wave (CW) THz imaging system is demonstrated for the THz propagation and detection.