Magnetic Properties of Fe-C Films Prepared by Getter Sputtering Method

The magnetic properties and structure of Fe-C system thin films were studied. Values of the intrinsic coercivity
M
H
C
increase from 50 ~ 70 Oe at a substrate temperature T
sub
= 200°C to their maxima of 250 ~ 310 Oe at T
sub
= 350°C. The saturation magnetization M
s
varies from 600 to 900 G, reaching a minima in the T
sub
range between 300 to 400°C, where the
M
H
C
values are maxima. X-ray diffraction analyses show an amorphous structure for the film at T
sub
= 150°C, and show several peaks for those at T
sub
= 250 ~ 400°C indicating micro-crystals of Fe
3
C, Fe and C.