BD180 - a new 0.18 μm BCD (Bipolar-CMOS-DMOS) Technology from 7V to 60V

We present a new BCD technology in a 0.18 μm technology platforms with a capability of 7 to 60V high-voltage devices such as DEMOS and LDMOS. The developed 0.18 mum BCD process provides various kinds of high voltage LDMOS such as 7, 12, 20, 50, 60 V LDMOS transistors for variety of applications. The power LDMOS transistors in the process have very competitive specific on-resistance compared to previous results.