Statics and dynamics performance evaluation for a high precision XYZ compliant parallel micromanipulator

The performance evaluation on a newly designed XYZ compliant parallel micromanipulator (CPM) in terms of statics and dynamics is carried out in this paper, which is quite necessary in designing the CPM considering the stiffness and natural frequency requirements. By investigating the elastic deformations in each flexure hinge, the stiffness model in the working directions of the CPM is established. In addition, by expressing both potential and kinetic energies of the CPM with the chosen generalized coordinates, the dynamic equation is derived via the Lagrangian approach. Through the finite element analysis performed in ANSYS software package, not only the stiffness model is tested by the nonlinear statics analysis, but also the dynamic model is verified based on the conducted modal analysis. The simulation results validate the effectiveness and efficiency of the obtained analytical models. And the presented results are meaningful for both the design and development of a CPM for micro/nano scale manipulation.