A 60-GHz Millimeter-Wave CPW-Fed Yagi Antenna Fabricated by Using 0.18- $\mu\hbox{m}$ CMOS Technology

This letter presents a 60-GHz millimeter-wave on-chip Yagi antenna fabricated with a 0.18- $\mu\hbox{m}$ CMOS process. A feeding network is designed in a coplanar waveguide (CPW) technology. The 0.18-$\mu\hbox{m}$ six-metal-layer CMOS process allows the on-chip antenna to utilize a simple CPW-to-coplanar-stripline feed transition and the first metal layer to implement a reflector strip. The CMOS antenna chip size is $\hbox{1.1} \times \hbox{0.95}\ \hbox{mm}^{2}$. A FEM-based 3-D full-wave electromagnetic solver, the HFSS, is used for design simulation. The measured antenna input VSWR is less than two from 55 to 65 GHz. The front-to-back ratio of the Yagi antenna is about 9 dB. The measured maximum antenna power gain is about $-$10 dBi. The simulated antenna radiation efficiency is about 10%.