Time Links Management Through Real-time Dispatch System

In the complex wafer fabrication processes, there are many steps with time links constraint defined. These time links are necessary for better yield and quality performance. In the very early days of manufacturing, these constraints are conformed to purely by the operator's memory. When basic Manufacturing Execution System (MES) was introduced, built-in timers were able to alert the operator on those lots whose time links were expiring. In this paper, a time links management system through the real-time lots dispatch system is being discussed. With the implementation of this system, there is an 83% reduction in the total number of time links lots expired per month. Challenges and limitations of this system will also be discussed.