Numerical simulation of the fluidic performance in a jet-based gyroscope

A novel jet-based micro gyroscope is designed and optimized numerically in this paper. The jetted airflow makes the angular rate sensor free of moveable proof-mass which greatly enhances its anti-shock capability. Flow performance of this circulating airflow inside the detection chamber is simulated by a CFD (computational fluid dynamic) tool. The numerical results provide convincing supports to the applicability of this novel jet- based gyroscope. Furthermore, a lumped-thermal model is adopted to predict the temperature difference between the two Pt heater/sensors which work as sensing parts.