A 2 μm Hi-CMOS II Technology

A high performance CMOS.( Hi-CMOS ) technology was first developed to overcome the power dissipation limitation of MOS LSIs.l) The low power, high speed 4K and 16K static memories have been developed by Hi-CMOS technology.2) 3) In this paper, a second generation high performance CMOS( Hi-CMOS II ) process and device technologies are described.