1.1K-Gate CMOS/SOI Gate Array by Laser Recrystallization Technique

Recently the CMOS device on a SOI structure (CMOS/SOI) has been paid much attention due to its capabilities of latch-up free and higher speed operation than current CMOS devices on bulk-Si. There have been several successful reports about CMOS/SOI, however they were concerned with only ring oscillatorsl,2) or rather small scale IC's3).