Evaluation of deteriorated anti-stiction layer in NIL

Mold releasing is one of the important issues in nanoimprint lithography (NIL). In this paper, de-molding force and friction coefficients for deteriorated surface statuses are quantitatively investigated to evaluate the surface quality of the mold. The mold surface is successfully deteriorated by UV irradiation as a durability inspection. The de-molding force and the friction coefficient are strongly depend on the contact angle of the mold surface. These results quantitative evaluation of the de-molding process and propose durability inspection method for anti-stiction layer.