Fabrication of a Micro-Fluidic Filter/Channel using MEMS Technology

This paper investigates the design and fabrication of a micro-fluidic filter/channel using different methods. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by microblaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.