Fabrication of Stainless Steel Mold using Electro Chemical Fabrication (ECF) method for Microfluidic Biochip

In this paper, SUS mold was fabricated using both ECF method and FeCl
₃
wet etching. The ECF mold showed the surface roughness values much better than that for FeCl
₃
etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold.