A study of Time Variable Multiple Objectives scheduler for wafer fabrication

Wafer fabrication (Fab) is a typical large-scale complicated manufacturing system. With the enhancement of modern Fab’s automation, one of important techniques is to determine lot priority index to meet multiple objectives. Usually different objectives may be paid diverse emphases which are represented by weights. In today’s highly dynamic manufacturing environment, weights of each individual objective may change along with time, and corresponding scheduling may be regarded as the Time-Variable-Multiple-Objectives (TVMO) scheduling. The proposed TVMO algorithm presents a practical and useful way to find out trade-off between better optimality for computation, which is essential for real-time response to changes in Foundry fab.