Scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure

This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.