MPCVD Processing of Titanium-diffused LiNbO3 Waveguides: Optical Characterisation and Waveguide Restoration

This paper presents some initial findings that explore the material properties of LiNbO
3
which has been exposed to a Microwave Plasma-enhanced Chemical Vapor Deposition (MPCVD) environment. The LiNbO
3
was found to undergo a process known as 'reduction' when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO
3
, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO
3
waveguide technologies.