Optical Performance of a MEMS Tunable IR Microspectrometer

The fabrication issues and optical performance of monolithically integrated microspectrometers are presented. The primary technical challenge in achieving the integration of a MEMS Fabry-Perot filter with the Hg
_x
Cd
_1-x
Te detector is to keep the processing temperature less than 125 degC. The results show successful device operation with tuning over 440 nm across the SWIR (1.6-2.5 mum) band, lineswidths of 55 nm, and switching times of 60 mus.