Barium strontium titanate thin film varactors on r-plane sapphire

This paper presents the microwave properties of barium strontium titanate (BST) thin films on r-plane sapphire substrates. A series of films with thickness 25 – 400 nm was prepared by pulsed laser deposition (PLD). Microwave properties of the films, including capacitance tunability and loss tangent, were extracted by patterning interdigitated capacitors (IDCs) on the film surface. The highest tunability of 64% was observed in the 200 nm film. These results demonstrate the possibility of integrating BST into the silicon on sapphire process.