Development of High Precision X-Y Stage Using for Production and Inspection Equipment of Organic Electro Luminescence Display

There is an increasing requirement for controlling linear motion from several ten nanometers to a few hundred of millimeter strokes in the area of the organic electro luminescence display (OLED) production and inspection equipment. The requirements of the high precision X-Y stage are low trajectory following error and high positioning accuracy. To satisfy these requirements, it has to be designed with the minimum velocity ripple and maximum acceleration. In this work, plane type X-Y stage having air bearing guide system is proposed, where each axis using linear motor is mounted on the slotted guide beam, isolation system and control system are used for performance requirement. The developed high precision X-Y stage is verified by performance test. From the performance test, moving stroke is 730mm(X-axis) and 920mm(Y-axis), repeatability is ±100nm(X-axis) and ±150nm(Y-axis), straightness is ±2.6μm(X-axis) and ±0.9μm(Y-axis), flatness is +2.3μm(X-axis) and ±0.4μm(Y-axis), velocity ripple is 0.19%(X-axis) and 0.47%(Y-axis) at 50mm/sec at each direction, and in position stability is ±69nm(X-axis) and ±59nm(Y-axis).