Integrated ZnO Surface Acoustic Wave Microfluidic and Biosensor System

This paper presents the development of a novel portable cancer diagnostic system, based on thin film ZnO surface acoustic wave device, with integrated functions of microfluidic transport, mixing and bio-detection devices. The device is easily integrated with electronic control circuitry and fabricated with low temperature on Si, glass or even polymer substrates. Such a system is targeted at both the consumer market for self-diagnosis and the professional healthcare market for real-time diagnosis in a hospital and clinic environment.