4D-2 Manipulation of Micro-Particles Using a Piezoelectric Actuator

In this paper we demonstrate the manipulation of single and multiple micro-particles using a bulk acoustic wave (BAW) piezoelectric actuator. Particle motion is achieved by a combination of inertial and acoustic forces, exerted by a piezoelectric actuator, onto particles placed on its surface. This manipulation technique is capable of controlled manipulation of single and multiple micro-particles. The particles can be moved as far as ten times their diameters. The forces generated by the actuator are characterized using a finite element method (FEM) simulation and a theoretical study of the interfacial forces. A comparative study of the forces generated by the actuator and the particle-surface interfacial forces measured using atomic force microscopy (AFM) is then performed to show the feasibility of this technique. Experimental and theoretical results show good agreement indicating that this technique can prove to be a versatile tool for the controlled non-destructive manipulation of single as well as multiple micro-particles in the fields of biosensors, tissue engineering, bio-chips, microfabrication and MEMS devices.